Model improvements to simulate charging in scanning electron microscope
نویسندگان
چکیده
منابع مشابه
the scanning electron microscope
it is only thirteen years since the scanning electron microscope has been available commercially. yet, even in this short period of time, this instrument has been a powerful tool in the investigation of topography, electrical and magnetic properties, crystal structure, cathodoluminescent characteristics etc. of solid specimens. today, this type of microscope has opened its place alongside the c...
متن کاملScanning Electron Microscope A To Z
Since the Scanning Electron Microscope (SEM) was first commercialized about 40 years ago, the SEM has shown a remarkable progress. Now, many types of SEMs are being used, and their performance and functions are greatly different from each other. To utilize these different SEMs, it is essential to recognize their features, as well as to understand the reasons for the contrast of SEM images. Thus...
متن کاملThe Scanning Confocal Electron Microscope
The Scanning Confocal Electron Microscope, is an instrument which permits the observation and characterization of sub-surface structures of thick, optically opaque materials at nanometer level resolutions. The instrument merges the capabilities of the scanning, transmission and x-ray microscopes, and achieves unprecedented resolutions in optically dense materials, by implementing the technology...
متن کاملCritical Issues in Scanning Electron Microscope Metrology
National Institute of Standards and Technology, Gaithersburg, MD 20899-0001 During the manufacturing of presentday integrated circuits, certain measurements must be made of the submicrometer structures composing the device with a high degree of repeatability. Optical microscopy, scanning electron microscopy, and the various forms of scanning probe microscopies are major microscopical techniques...
متن کاملMagnification-continuous static calibration model of a scanning-electron microscope
We present a new calibration model of both static distortion and projection for a scanning-electron microscope (SEM). The proposed calibration model depends continuously on the magnification factor. State-of-the-art methods have proposed models to solve the static distortion and projection model but for a discrete set of low and high magnifications: at low magnifications, existing models assume...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Micro/Nanolithography, MEMS, and MOEMS
سال: 2019
ISSN: 1932-5150
DOI: 10.1117/1.jmm.18.4.044003